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5 AMAT
P-5000 CVD
AMAT P-5000 CVD Vintage : 1997.12 S/N : ..  1997.12  01-31 
4 Applied Materials
P5000
Plasma Enhanced TEOS CVD Chamber Configu..  1996  09-26 
3 Applied Materials
P5000
Metal Etch Process Tool Chamber Configu..  1994  09-26 
2 Applied Materials
P5000 Poly Etch
Poly Etch ESC configured 6" tool Serial ..  Jun 1995  09-26 
1 Applied Materials
P5000
Plasma Enhanced CVD Chamber configurati..  1994  07-05 

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